A Study on Data Gathering based on Agent for APC in FA

This paper presents a data gathering for Advanced Process Control (APC) in FA (Factory Automation). It is important that the gathered data in FA to control all the processing, to be a predictive maintenance of equipments and manage products. We gathered the entire data of all in FA through Equipment Engineering System (EES) and analyzed that to control a processing, predict the next processing and manage the various things for the enhancement of productivity, overall equipment efficiency, product yield and quality. And we enabled APC to operate micro process control by gathering data from the process control system not only in the current process in real time but also in past process through back-tracking of products [1, 5]. So, we control micro process based on the acquired data using simulating functionality using APC. This simulation produces the outcome of the data analysis and the operation of micro process control that leads to reduce errors. The proposed the data gathering system based on agent brings an efficient management of micro process control in automated processing. It is optimized in the semi-conductor and the flat panel display (FPD) industry.